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Machine tools play key roles in modern manufacturing industry. The quality of machined products is largely depended on the status of machines in various aspects such as vibration and appropriate vibration monitoring would be essential for both quality control and the safety and life assessment of machine tools. However, currently used piezoelectric or MEMS based accelerometers all have their own sensitivity and bandwidth limitations and may not suitable for machine tool monitoring, where both high sensitivity and high bandwidth are required. In this work, a design to form a vibrating sensing module by integrating several MEMS accelerometers with different dynamic characteristics is proposed and investigated.  By such an approach, a low cost accelerometer with superior dynamic behavior at any frequencies expected.  This work presents the preliminary study toward this goal, including overall conceptual design, sensor calibration, amplification and signal conditioning circuits layout, and preliminary integration, testing, and demonstration on a CNC machine tool. The primary test results are promising and it is believed that the design would play important role in future machine monitoring tasks.

Design of a Novel Sensing Module for Machine Tool Vibration Monitoring by Integrating Multiple MEMS Accelerometers