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In this study, the solidly mounted resonator (SMR) device is composed of a piezoelectric layer sandwiched between two electrodes on a Bragg reflector attached to a silicon substrate. To obtain appropriate SMR characteristics for the new-generation communication applications, the surface roughness of Bragg reflector has been investigated thoroughly. Manufacture parameters are adjusted in accordance with the results of atomic force microscopy (AFM) and scanning electron microscopy (SEM). The frequency response is measured using an HP8720 network analyzer and a CASCADE probe station. Afterwards, a ¼λ mode SMR is experimentally realized. The surface roughness of 6.442 nm and well return loss can be achieved for four-pair SiO 2 /Mo Bragg reflector.

The Bragg Reflector Layer of Low Surface Roughness Based on Solidly Mounted Resonators