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MOCVD large size substrate bearing disk, working in high temperature, high speed rotating and complex gas phase environment, in the high-speed rotation of the material is easy to deformation, vibration or flutter, to its rotation compensation control vibration will become very complicated. This article is based on fuzzy neural network study of bearing plate of high speed vibration, through optimal controller is designed to make the whole system performance index.

Cyber-physical Modeling of Rotation Vibration Compensation of MOCVD Substrate Bearing Disk