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Firstly this paper introduces the traditional switchgear temperature measurements, including the empirical method, infrared temperature measurement, optical fiber temperature measurement, SAW temperature measurement, low power sensor temperature measurement, microelectronic device temperature measurement, which focuses on the different principles and features of the method, and conducts feasibility analysis of the practical application of measuring the switchgear temperature rising effect. Finally, a micro-electro-mechanical system (MEMS) sensor design based on micro-nanoelectronic process is proposed, which is the piezoresistive cantilever MEMS temperature sensor. The main design parameters of the sensor determined by COMSOL simulation and sensor processing technology are invented.1

Design of MEMS Temperature Sensor for High Voltage Switchgear