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According to the characteristics and control requirements of cryogenic plasma equipment system, a measurement and control system based on CAN bus and Ethernet is designed. In the system, the LM3S8962 chip is taken as the core chip, and the intelligent node controllers with CAN and Ethernet communication interface are designed, and the underlying equipment driver program is completed. The control program of each node and the man-machine interface with the host computer are also designed. The characteristic analysis and performance test of the network measurement and control system are carried out, and the expected functions are achieved. Introduction The plasma is a kind of material form consisting of free electrons and charged ions. It is often regarded as the fourth state of matter, after solid, liquid and gas. There are three types of plasma: high temperature plasma, hot plasma and cold plasma [1]. Low temperature plasma is mainly used for the plasma-assisted film deposition, plasma polymerization, material surface modification, biological sample treatment, nano-material preparation, plasma chemistry and electron beam, the generation of particle beam and laser beam [2]. With the development of the research on plasma and the related processing technologies, the precision improvement of industrial processing equipment and the development of power electronics technology, various testing and control devices have been applied in this field, such as mechanical pressure gauges, manual control valves and off-line plasma parameter diagnostic equipment, which makes the parameters of low temperature plasma can be controlled. Therefore, the treatment process effect of plasma is as good as that of traditional process, and even surpass that of traditional methods in some fields. The advantages of low-temperature plasma such as non-waste, non-pollution and low cost are gradually highlighted. At present, there are a number of well-known low temperature plasma equipment manufacturers in the world, such as Plasma Technology and Diener in Germany, Europlasma in Belgium and MKS, AGS Plasma Systems and Plasma Technology Systems in the United States. These companies can not only provide complete sets of equipment and components, but also provide customers with overall solutions. Moreover, their products generally have multiple communication interfaces, which improves the flexibility of users. For example, MKS company's 13.56 MHz RF plasma power supply, DC high voltage and DC pulse power supply series products, which provide both Fieldbus interfaces of DeviceNet (based on CAN) and Profibus, besides the traditional RS-232 communication interface. Most cryogenic plasma surface treatment equipment produced by Plasma Technology Systems Company can provide USB and Ethernet interfaces. However, in China, the development of cryogenic plasma equipment started late [3, 4]. After rapid development in recent years, some companies with slight strength have emerged in China, such as Shenyang Scientific Instruments Co., Ltd. of the Chinese Academy of Sciences, Nanjing Suman Electronics Co., Ltd. and Gouding Nanotechnology Co., Ltd. However, compared with well-known foreign companies, the equipment produced by these companies not only have poor reliability and measurement accuracy, but also have the problems of inadequate application of modern measurement and control means, low automation

Research and Design of the Measurement and Control System of Low-temperature Plasma Equipment Based on CAN Bus and Ethernet