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Oxygen deficient YBaCuO thin films, c-epitaxially grown by laser ablation on different substrates such as (100)Mg0, (100)SrTiO3 and (100)LaAlO3, were fluorinated by an ex situ solid/gas reaction with NF3 (3% NF3 diluted in N-2) at 280 degrees C. The kinetics of the reaction depends on the type of the substrate. After reaction the superconducting behaviour of the films is improved without degradation of their crystallinity, whatever the nature of the substrate. The stability al the fluorinated films under oxygen or nitrogen gas was studied. All these results will be compared with those previously obtained for fluorination of oxygen deficient YBaCuO ceramics.

Fluorination Under NF3Flow of Oxygen Deficient YBa2Cu3OxThin Films Deposited on Various Types of Substrate