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Phosphor-conversion white light structures were obtained using an original approach of deposition zirconium oxide (ZrO2) layers by the atomic layer deposition method and doping these layers with rare-earth (RE) ions by the spin-coating technique. Crystalline atomic layer deposition films in tetragonal phase were deposited at relatively low temperature (well below 250 ◦C). ZrO2:RE multilayer structure was tested as an active layer, which can convert short wavelength emission (UV emission) to light in the visible spectral range. This can be an effective method to achieve the white-light emission.

White Light Using Phosphor Structure of ZrO2 Films with RE Prepared by Atomic Layer Deposition and Spin Coating