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Structure and Physicomechanical Properties of Nanostructured (TiHfZrNbVTa)N Coatings after Implantation of High Fluences of N (10 cm−2) A.D. Pogrebnjaka,b,∗, O.V. Bondar, S.O. Borba, K. Piotrowska and O. Boiko Sumy State University, Department of Nanoelectronics, R.-Korsakova 2, 40007, Sumy, Ukraine Department of Electrical Devices and High Voltage Technology, Lublin University of Technology, 20-618 Lublin, Poland Institute of Technological Systems of Information, Lublin University of Technology, 20-618 Lublin, Poland

acta physica polonica. a

Structure and Physicomechanical Properties of Nanostructured (TiHfZrNbVTa)N Coatings after Implantation of High Fluences of N+(1018cm-2)