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In this paper, the e ect of substrate temperature on the electrical, structural, morphological and optical properties of nanostructured polycrystalline zinc oxide thin lms were investigated by the Hall measurement, Xray di raction, scanning electron microscopy and UV-visible spectrophotometer, respectively. Then these modi ed thin lms were deposited on two kinds of single crystal and polycrystalline of nand p-type Si in three di erent substrate temperatures of 300, 400 and 500 ◦C by low cost atmospheric pressure chemical vapor deposition method. Like the samples grown on the glass substrate, with increase of the temperature in samples grown on single crystal Si, preferred orientation changes from (100) to (002), while in samples deposited on poly crystalline Si, preferred orientation remains (100).

Dependence of ZnO Nanostructured Thin Films Properties on Growth Temperature by APCVD Method