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We present optimization of energy transfer in the wayeguide-supplied metal-cylinder-based microwave plasma module with an inner cylindrical quartz tube. The construction of microwave plasma module is based on a WR 340 wayeguide standard. Presented microwave plasma module operates at atmospheric pressure and frequency of 2.45 GHz. There is a reduced height section wayeguide in microwave plasma module which provides local increase of the electric field in the plasma region. Microwave plasma module is terminated with a movable plunger which plays the role of the tuning element. Tuning characteristics of microwave plasma module are defined as the dependence of the P-R/P-I on the position l(s) of the movable plunger, where P-R and P-I are the microwave power reflected and power incident, respectively. The powers P-R and P-I are measured in the input plane of microwave plasma module. The purpose of the presented optimization is to achieve P-R lower than 5% of P-I in widest range of position of movable plunger l(s). We used Comsol Multiphysics software to make numerical analysis which allows to optimize the parameters of microwave plasma module. Results of numerical analysis show that P-R/P-I is lower than 0.05 in a wide range of movable plunger position l(s).

Numerical Analysis of Metal-Cylinder-Based Microwave Plasma Module