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M. Guziewicz, W. Slysz, M. Borysiewicz, R. Kruszka, Z. Sidor, M. Juchniewicz, K. Golaszewska, J.Z. Domagala, W. Rzodkiewicz, J. Ratajczak, J. Bar, M. Wegrzecki and R. Sobolewski Institute of Electron Technology, al. Lotnikow 32/46, 02-668 Warsaw, Poland Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, 02-668 Warsaw, Poland Departments of Electrical and Computer Engineering and Physics and Astronomy, Materials Science Program

Technology of Ultrathin NbN and NbTiN Films for Superconducting Photodetectors