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The sol-gel method is a chemical way to produce glass and ceramics from a liquid phase [1]. The basic processes involve the hydrolysis of alkoxides of respective metals or non-metals leading to the formation of sol, and the condensation, which leads to the formation of gel. Optical films for planar optics are most frequently fabricated using dip-coating or spin coating methods. The process is finished up by heating, after which the films assume their final properties. One of the principle advantages of sol-gel method is the ability to control the structure of the produced materials. From the same material we can produce films of a different structure and hence of different refractive indices. The work presents silica films produced with sol-gel method of extremely different refractive indices as well as two-component waveguide layers SiO2:TiO2 of very low attenuation. We have produced silica films of the minimum refractive indices ≈ 1.2 and two-component films of the refractive index above 1.8. The films of such refractive indices can be widely applied in planar photonics. The elaborated silica films have already been applied in sensitive film technology [2], and the two-component films are being applied as waveguide layers [3–7].

Silica-Titania Films Fabricated by Sol-Gel Method for Applications in Planar Photonics