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X-ray rocking curve imaging technique was used to study crystallographic perfection of laterally overgrown epitaxial structures. We focus on rocking curve imaging studies of Si-doped GaAs and GaSb laterally overgrown layers grown by liquid phase epitaxy on SiO(2) masked GaAs and GaSb/GaAs substrates: respectively High spatial resolution offered by rocking curve imaging technique allows studying the effect of laterally overgrown epitaxial wing tilt towards the mask. Distribution of tilt magnitude over the area of laterally overgrown epitaxial stripes is easily determined. In heteroepitaxial GaSb/GaAs laterally overgrown epitaxial structures local mosaicity ill the will,; area was detected. Since individual grains are clearly visible oil rocking curve imaging maps, their size and relative misorientation can be determined.

Rocking Curve Imaging Studies of Laterally Overgrown GaAs and GaSb Epitaxial Layers