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Physical foundations of directional auger electron spectroscopy (DAES) and calculation of DAES profiles in single scattering cluster approach are presented. Limitations of this method (application only to investigation of the crystalline structure of homogeneous samples) is shown and explained as the result of participation of inelastically scattered electrons in the Auger signal generation. To extend the DAES application for the interface structure, the use of as low as possible energy of primary electrons is proposed because in such a case the participation of inelastically scattered electrons becomes negligible and single scattering cluster calculation should describe correctly the DAES profiles for interfaces. Besides, the extension of single scattering cluster calculations to the second elastic scattering is recommended. To check the technical possibility of DAES use in the proposed version, the Auger spectrum of Cu LMM peaks was recorded for a Cu3Au(001) sample with the use of a retarding field analyzer with the primary beam energy 1200 eV. Quality of this spectrum seems to be good enough for using in DAES.

Directional Auger Electron Spectroscopy - Possibilities, Limitations and Proposal of Improvements