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Laser structuring as a stage of laser micromachining operations for a glass-carbon plate processing is described. The operations of laser scribing, milling, cleaning and marking were used for production of the field-emission multi-beam cathode preform. The operation of structuring was applied for production of micropeaks on the surface of the cathode beams. Two different approaches were tested for laser structuring of the cathode beams - linear scan and overlapping blind holes. The nanopeaks are self-organized in the process of the structuring. As a result we obtained a field-emission cathode with a high density of the current emission and a shorter technological route of its production.

Laser Structuring of Glass-Carbon for Improvement of Its Emitting Properties