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Small highly efficient ultrasonic transducers are in high demand to fabricate compact parametric speakers. We focus on small piezoelectric transducers that can be used for ultrasonic emitters of parametric speakers. Typical small piezoelectric transducers have piezoelectric boards and radial cones. We propose a transducer consisting of a unimorph diaphragm and a flat metal plate. This structure gives two resonant peaks, which are determined by the physical parameters and dimensions of the diaphragms, the flat plate, and their junction structure. Controlling these resonant peaks is one approach to fabricating transducers having the ideal frequency response of the sound pressure for parametric speakers. We devised a design to control these two resonant peaks by adjusting the junction structure of the diaphragm and the flat plate. Using the results of a theoretical analysis, we designed an improved transducer that satisfies the ideal frequency response for parametric speakers.

Design of an ultrasonic piezoelectric transducer having double-linked diaphragms for parametric speakers