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In this letter, we characterize the internal dissipation of coatedmicro-cantilevers through their mechanical thermal noise. Using a home-madeinterferometric setup, we achieve a resolution down to 1E-14m/rtHz in themeasurement of their deflection. With the use of the fluctuation dissipationtheorem and of the Kramers-Kronig relations, we rebuilt the full mechanicalresponse function from the measured noise spectrum, and investigate frequencydependent dissipation as a function of the air pressure and of the nature ofthe metallic coatings. Using different thicknesses of gold coatings, we discussthe source of the internal viscoelastic damping.

Dissipation of micro-cantilevers as a function of air pressure and metallic coating