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Atomic Force Microscope images of a crack intersecting the free surface of aglass specimen are taken at different stages of subcritical propagation. Fromthe analysis of image pairs, it is shown that a novel Integrated Digital ImageCorrelation technique allows to measure stress intensity factors in aquantitative fashion. Image sizes as small as 200 nm can be exploited and thesurface displacement fields do not show significant deviations from linearelastic solutions down to a 10 nm distance from the crack tip. Moreover, thisanalysis gives access to the out-of-plane displacement of the free surface atthe crack tip.

Measuring Nanoscale Stress Intensity Factors with an Atomic Force Microscope