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Highly sensitive, wide-measurement-range compact load sensors are desirable for various applications, including measurement of biosignals, manipulation and stiffness measurement of cells, and so on. Conventional load sensors are highly sensitive but have relatively small measurement ranges. A load sensor using an AT-cut quartz crystal resonator (QCR) has superior characteristics such as, high accuracy, improved strength under compressive stress, long-term stability, and compact size. However, a retention mechanism is required to firmly support the QCR because the QCR is easily broken by stretching and bending motions. Conventional machining processes are not suitable for further miniaturization of the sensor. Even if the retention mechanism were miniaturized, the assembly process is complicated.

Miniaturized load sensor using quartz crystal resonator constructed through microfabrication and bonding