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An ultra-low voltage microelectromechanical system (MEMS) switch for low-power integrated circuit (IC) applications is proposed, fabricated and demonstrated. The folded hinge structure allows a large beam structure to be suspended with a designed air gap, effectively suppressing unwanted deflection. The actuation voltage of the switch was measured to be 1.7 V, the lowest among electrostatic switches. There was no variation in the actuation voltage until 106 cyclic actuations, showing the stability of a low actuation voltage in electrostatic actuation for the first time. The contact resistance was around 12 Ω, caused by a low contact force below 1 μN despite an Au–Au contact.

Ultra-low voltage MEMS switch using a folded hinge structure