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In this paper, we demonstrate a trilayer hybrid terahertz (THz) modulator made by combining a p-type silicon (p-Si) substrate, TiO 2  interlayer, and single-layer graphene. The interface between Si and TiO 2  introduced a built-in electric field, which drove the photoelectrons from Si to TiO 2 , and then the electrons injected into the graphene layer, causing the Fermi level of graphene to shift into a higher conduction band. The conductivity of graphene would increase, resulting in the decrease of transmitted terahertz wave. And the terahertz transmission modulation was realized. We observed a broadband modulation of the terahertz transmission in the frequency range from 0.3 to 1.7 THz and a large modulation depth of 88% with proper optical excitation. The results show that the graphene/TiO 2 /p-Si hybrid nanostructures exhibit great potential for terahertz broadband applications, such as terahertz imaging and communication.

High-Performance All-Optical Terahertz Modulator Based on Graphene/TiO2/Si Trilayer Heterojunctions