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We report the electrochemical performance of porous NASICON-type Li 3 Fe 2 (PO 4 ) 3  thin films to be used as a cathode for Li-ion microbatteries. Crystalline porous NASICON-type Li 3 Fe 2 (PO 4 ) 3  layers were obtained by radio frequency sputtering with an annealing treatment. The thin films were characterized by XRD, SEM, and electrochemical techniques. The chronoamperometry experiments showed that a discharge capacity of 88 mAhg −1  (23 μAhcm −2 ) is attained for the first cycle at C/10 to reach 65 mAhg −1  (17 μAhcm −2 ) after 10 cycles with a good stability over 40 cycles.

Porous NASICON-Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li-Ion Microbatteries