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The formation mechanisms of Ag- and Au-ordered structures on single-crystal silicon (Si) (111) and Si (110) surfaces were researched using high-resolution scanning tunneling microscopy method. It was shown that different patterns of self-assembled nanostructures with very precise and regular geometric shapes can be produced by controlling process parameters of thermal metal spraying on the substrate. The surfaces of nanorelieves at each stage of deposition were researched, and the main stages of morphological transformation were fixed.  Self-ordered hexagonal pyramid-shaped nanostructures were formed at thermal deposition of gold on the Si (111), whereas only monolayer hexagonal formation could be observed on the plane Si (110). Gold monolayer flake nanostructures were obtained under certain technological parameters.  Atomically smooth Ag film cannot be obtained on the Si (111) surface by means of thermal spraying at room temperature. The formation of two-dimensional (2D) clusters takes place; heating of these clusters at several hundred degrees Celsius leads to their transformation into atomically smooth covering.  The weak interaction between Ag multilayer coatings and substrate was established that allows to clear crystal surface from metal with reproduction of the reconstructed Si (111) 7 × 7 surface by slight warming. The offered method can be used for single-crystal surface protection from destruction.

Silver- and Gold-Ordered Structures on Single-Crystal Silicon Surface After Thermal Deposition