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Transparent and flexible capacitors based on nanolaminate Al 2 O 3 /TiO 2 /Al 2 O 3  dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm 2  at 10 KHz was obtained, corresponding to a dielectric constant of 26.3. Moreover, a low leakage current density of 3.9 × 10 −8  A/cm 2  at 1 V has been realized. Bending test shows that the capacitors have better performances in concave conditions than in convex conditions. The capacitors exhibit an average optical transmittance of about 70% in visible range and thus open the door for applications in transparent and flexible integrated circuits.

Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3