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Si microwire array anodes have been prepared by an economical, microelectronics compatible method based on macropore etching. In the present report, evidence of the scalability of the process and the areal capacity of the anodes is presented. The anodes exhibit record areal capacities for Si-based anodes. The gravimetric capacity of longer anodes is comparable to the one of shorter anodes at moderate lithiation/delithiation rates. The diffusion limitation of the lithium ions through the electrolyte in depth among the wires is the limiting factor for cycling longer wires at high rates.   PACS  82.47.Aa; 82.45.Vp; 81.16.-c

Scalable processing and capacity of Si microwire array anodes for Li ion batteries