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We report a novel epitaxial growth of EuTiO 3  films on SrTiO 3 (001) substrate by hydrothermal method. The morphological, structural, chemical, and magnetic properties of these epitaxial EuTiO 3  films were examined by scanning electron microscopy, transmission electron microscopy, high-resolution X-ray diffractometry, X-ray photoelectron spectroscopy, and superconducting quantum interference device magnetometry, respectively. As-grown EuTiO 3  films with a perovskite structure were found to show an out-of-plane lattice shrinkage and room-temperature ferromagnetism, possibly resulting from an existence of Eu 3+ . Postannealing at 1,000°C could reduce the amount of Eu 3+ , relax the out-of-plane lattice shrinkage, and impact the magnetic properties of the films.   PACS  81.10.Aj; 81.15.-z; 61.05.-a

Hydrothermal epitaxy and resultant properties of EuTiO3 films on SrTiO3(001) substrate