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Transition metal (TM)-doped TiO 2  films (TM = Co, Ni, and Fe) were deposited on Si(100) substrates by a sol–gel method. With the same dopant content, Co dopants catalyze the anatase-to-rutile transformation (ART) more obviously than Ni and Fe doping. This is attributed to the different strain energy induced by the different dopants. The optical properties of TM-doped TiO 2  films were studied with spectroscopic ellipsometry data. With increasing dopant content, the optical band gap ( E  OBG ) shifts to lower energy. With the same dopant content, the  E  OBG  of Co-doped TiO 2  film is the smallest and that of Fe-doped TiO 2  film is the largest. The results are related to electric disorder due to the ART. Ferromagnetic behaviors were clearly observed for TM-doped TiO 2  films except the undoped TiO 2  film which is weakly magnetic. Additionally, it is found that the magnetizations of the TM-doped TiO 2  films decrease with increasing dopant content.

Influence of transition metal doping on the structural, optical, and magnetic properties of TiO2 films deposited on Si substrates by a sol–gel process