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The lithium-doped nickel oxide (L-NiO) films were synthetized using the modified spray pyrolysis method with a two-step grown process. By observing the spectra of X-ray photoemission spectroscopy of L-NiO films, the intensity of Ni 2 p  3/2  peak of Ni 3+  bonding state increases with increasing Li concentration that causes the decrease of transparency and resistivity. The L-NiO films with optimum characteristics were obtained at Li = 8 at%, where a p-type resistivity of 4.1 × 10 −1  Ω cm and optical transparency above 76% in the visible region are achieved.

Investigation of the properties of nanostructured Li-doped NiO films using the modified spray pyrolysis method