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In this work, bipolar resistive switching characteristics were demonstrated in the Pt/ZnO/Pt structure. Reliability tests show that ac cycling endurance level above 10 6  can be achieved. However, significant window closure takes place after about 10 2  dc cycles. Data retention characteristic exhibits no observed degradation after 168 h. Read durability shows stable resistance states after 10 6  read times. The current transportation in ZnO films is dominated by the hopping conduction and the ohmic conduction in high-resistance and low-resistance states, respectively. Therefore, the electrical parameters of trap energy level, trap spacing, Fermi level, electron mobility, and effective density of states in conduction band in ZnO were identified.

Reliability characteristics and conduction mechanisms in resistive switching memory devices using ZnO thin films