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Based on the porous anodic aluminum oxide templates, ordered SnO  x   nanopore films (approximately 150 nm thickness) with different  x  ( x  ≈ 0.87, 1.45, 2) have been successfully fabricated by direct current magnetron sputtering and oxidizing annealing. Due to the high specific surface area, this ordered nanopore films exhibit a great improvement in recovery time compared to thin films for ultraviolet (UV) detection. Especially, the ordered SnO  x   nanopore films with lower  x  reveal higher UV light sensitivity and shorter current recovery time, which was explained by the higher concentration of the oxygen vacancies in this SnO  x   films. This work presents a potential candidate material for UV light detector.   PACS : 81.15.Cd, 81.40.Ef, 81.70.Jb, 85.60.Gz.

Fabrication and ultraviolet photoresponse characteristics of ordered SnO x (x ≈ 0.87, 1.45, 2) nanopore films