Substrate Materials Micromachining and Surface Considerations

Subject material presented describes substrate materials and their processing as key elements in microsystems technology manufacturing (MST) for Biochips (DNA arrays), Electronic MEMS (Micro-Electro-Mechanical) Devices and electro-optics. Material choices are primarily glass, quartz and silicon, each of which may require mechanical features and exact surface finishes to enable design function and manufacturing. This paper will address some basic approaches to determining what substrates require for specific designs and manufacturing processes.