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We report the structural and optical characterization of one-dimensional porous silicon microcavities. These structures are based on a planar resonator formed by two high-reflectance mirrors separated by a thin active optical spacer. In order to simulate and predict the optical properties of the microcavity, the transfer matrix method is used. A strong correlation between the formation parameters and the reflectance spectra is introduced. The prepared microcavities are exposed to thermal oxidation. The resonance position of the microcavity exhibits a blueshift proportional to the degree of oxidation. Structural changes of the microcavities after oxidation are investigated and analyzed using X-ray diffraction and Raman spectroscopy. The observed shift of characteristic silicon peak is attributed to the reduction of silicon crystallites as the oxidation increases.

Impact of thermal oxidation on the structural and optical properties of porous silicon microcavity