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This work presents a study of the substrate effect on Ultra Thin Body and Buried Oxide (UTBB) SOI transistors. The work analysis was performed based on theoretical models, numerical simulations and experimental measurements. Experimentally, it is possible to notice that the presence of the ground plane implantation (GP) below the buried oxide eliminates and/or minimizes some undesirable effects of the substrate, as the variation of potential drop on third interface (buried oxide/substrate). The interface trap density (Nit) was an important parameter on simulation adjustment to obtain drain current curves as function of front gate bias and back gate bias close to the experimental. The interface trap density of the front and back interface were adjusted to the value of 2x1011 e V cm after the experimental curves were analyzed. So from these simulations, it can be verified that the model used in the simulator was compatible with the experimental results, with error < 10%. It is noted that the analytic model proposed by Martino et al. to analyze the substrate effect for fully depleted SOI transistor with thicker silicon thickness (above 40 nm) is useful for UTBB SOI devices with long channel (L=10 μm) until the back interface reach the inversion, when the model is no longer valid. Using the analytic model, it was also possible to determine the values of VGBmax and VGBmin, which represents the back voltage required to change de third interface from inversion to depletion mode (VGBmin), and the depletion to accumulation mode (VGBmax). The value of VGBmax ranged from 0,57 V to 0,75 V and for VGBmin ranged from -0,08 V to -3,39 V. The analytic model has more agreement for short channel (L = 70nm) transistor than the longer one (L = 10μm), probably due to the electrostatic coupling between de drain/source and the channel that delays the formation of inversion channel on third interface extending the validity range of the model. By the numerical simulation, it was possible to analyze the electron concentration along the transistor. It was observed that the mode of the third

Efeito do substrato em transistores SOI de camada de silício e óxido enterrado ultrafinos.