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PINHEIRO, J. A (2009). Application of a PID Controller for a Piezoelectric Tilt Stage. Dissertação (Mestrado) – Escola de Engenharia de São Carlos, Universidade de São Paulo. A Micro Tilt Stage (MTS) was developed in the Precision Engineering Laboratory (University of São Paulo) to be used in commercial diamond turning machines. The MTS has the aim of positioning workpieces angularly with high resolution and repeatability before and during ultraprecision machining. The use of flexural bearings and piezoelectric actuators together with a PID control system provided improved dynamic performance. The control strategy is based on data acquisition using LabViewTM to create standard curves and perform the correction of positioning errors. Experimental tests are performed with displacement of the (MTS), up to 24 μm, with frequency, up to 3 Hz. The use of a Chebyshev filter caused a delay and a strong instability in the system. In conclusion, in order to improve the performance of the system in terms of frequency, the use of a FIR filter (Finite Impulse Response) may be indicated. Key word: diamond turning machines, ultra-precision, control techniques, PID, piezoelectric actuators.

Desenvolvimento de um controlador PID para aplicação em uma mesa angular rotativa