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In this study, the precise tracking problem for electrostatic micromirror systems with disturbances and input saturation is investigated. Inspired by the composite nonlinear feedback (CNF)’s improvement of the transient performance and the sliding mode control’s enhancement of the robustness, a novel integral sliding mode with reaching law (ISMRL)-based composite nonlinear feedback (CNF) controller is proposed. Then, the stability of the closed-loop system is proved based on Lyapunov theorem. Finally, numerical simulations are investigated to evaluate the effectiveness of the proposed scheme. It is shown that the closed-loop system with the proposed scheme has precise positioning and improved transient performance in presence of time-varying disturbances.

Design of a Novel Integral Sliding Mode-Based Composite Nonlinear Feedback Controller for Electrostatic MEMS Micromirror