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In large areas of laser drilling, the residual vibration occurs when the sample stage moves in PTP (Point to Point) movement. It affects the surface quality and processing efficiency of the holes. The common solution for this problem is to set the laser irradiation delay time by the controller to wait for the residual vibration attenuation, but the whole drilling circle will increase. In this paper, a new method is introduced to reduce the laser drilling circle. By setting the allowable threshold of the residual vibration for the subsequent process, the sum of the time in deceleration segment of the trapezoidal moving profile, and the time when the residual vibration attenuates below the amplitude threshold (ST) can be minimized as the optimization goal. The results show that for a given operating speed, there is always an optimum acceleration value for the deceleration segment of the trapezoidal moving profile, which minimizes the ST value. Further, the delay time for laser irradiation can also be estimated according to the optimal acceleration during laser drilling.

A Novel Method to Reduce the Laser Drilling Time for Hole Cluster considering the Influence of Residual Vibration of the Sample Stage