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A novel design concept of multi-degree-of-freedom (multi-DOF) piezoelectric actuator is introduced in the paper. The main idea is to connect two identical piezoelectric transducers by hyperelastic material in order to increase the total number of degrees-of-freedom of the system. Such design principle also allows to separate vibrations of two piezoelectric transducers and to control them independently. The ring- and cylinder-type piezoelectric transducers were used to design two multi-DOF ultrasonic actuators for precise laser beam positioning. Reflecting mirror is mounted on the top of the actuator and is preloaded by magnetic force. Both disc- and cylinder-type actuators can realize up to six degrees-of-freedom, i.e., to rotate the mirror about three axes employing one transducer and to position mirror in the plane by using another transducer. Bidirectional rotation and translation motion of the mirror are obtained by switching excitation signals between different electrodes of the transducers. Both the numerical simulation and physical prototype were used to verify operating principle of the actuators. Numerical investigation of the piezoelectric actuator was performed to investigate modal-frequency and harmonic response analysis while experimental study was performed to measure electrical and mechanical output characteristics of the piezoelectric actuator. A mathematical model of contacting force control was proposed, and numerical verification was performed when the mirror need to be rotated according to the specific motion trajectory.

Multi-DOF Ultrasonic Actuators for Laser Beam Positioning