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Permanent magnet linear motors (PMLMs) are gaining increasing interest in ultra-precision and long stroke motion stage, such as reticle and wafer stage of scanner for semiconductor lithography. However, the performances of PMLM are greatly affected by inherent force ripple. A number of compensation methods have been studied to solve its influence to the system precision. However, aiming at some application, the system characteristics limit the design of controller. In this paper, a new compensation strategy based on the inverse model iterative learning control and robust disturbance observer is proposed to suppress the influence of force ripple. The proposed compensation method makes fully use of not only achievable high tracking accuracy of the inverse model iterative learning control but also the higher robustness and better iterative learning speed by using robust disturbance observer. Simulation and experiments verify effectiveness and superiority of the proposed method.

A New Linear Motor Force Ripple Compensation Method Based on Inverse Model Iterative Learning and Robust Disturbance Observer