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The dynamical analysis and control of a nonlinear MEMS resonator system is considered. Phase diagram, power spectral density (FFT), bifurcation diagram, and the 0-1 test were applied to analyze the influence of the nonlinear stiffness term related to the dynamics of the system. In addition, the dynamical behavior of the system is considered in fractional order. Numerical results showed that the nonlinear stiffness parameter and the order of the fractional order were significant, indicating that the response can be either a chaotic or periodic behavior. In order to bring the system from a chaotic state to a periodic orbit, the optimal linear feedback control (OLFC) is considered. The robustness of the proposed control is tested by a sensitivity analysis to parametric uncertainties.

On an Optimal Control Applied in MEMS Oscillator with Chaotic Behavior including Fractional Order