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SiO2 nanoparticles in PCVD process were investigated by SEM, TEM, and optical emission spectra (OES). There are large spherical SiO2 particles with diameter of 50–200 nm and more small particles about 10–50 nm in PCVD process. Size of SiO2 particles is influenced by distance and feeding speed but not electron temperature. The amount of large spherical SiO2 particles decreases with the increase of distance and decrease of feeding speed due to lower concentration. In addition, the evolution of SiO2 particles was inferred from the experimental results

Characteristics of Silicon Dioxide Particles in PCVD Synthesizing Silica Glass Process