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In order to ensure the steady ability of the LED wafer transporting robot, a high order polynomial interpolation method is proposed to plan the motion process of the LED wafer transporting robot. According to the LED wafer transporting robot which is fast and has no vibration, fifth-order polynomial is applied to complete the robot’s motion planning. A new subsection search method is proposed to optimize the transporting robot’s acceleration. Optimal planning curve is achieved by the subsection searching. Extended Kalman filter algorithm and PID algorithm are employed to follow the tracks of planned path. MATLAB simulation and experiment confirm the validity and efficiency of the proposed method

Three-Stage Tracking Control for the LED Wafer Transporting Robot