Open AccessEvidence of Layer-by-Layer Oxidation of Ge Surfaces by Plasma Oxidation Through Al2O3
Author(s) -
Rui Zhang,
Po-Chin Huang,
Ju-Chin Lin,
Mitsuru Takenaka,
Shinichi Takagi
Publication year - 2012
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-02/43/3190
Subject(s) - layer (electronics) , plasma , materials science , chemistry , chemical engineering , nanotechnology , physics , engineering , quantum mechanics
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