Open AccessCorrelation between Electrical and Optical Properties of Tantalum Anodic Oxide and Electron Cyclotron Resonance Etching Studies of E-beam Deposited Ta2O5 Films
Author(s) -
A. Kulpa,
Nicholas A. F. Jaeger
Publication year - 2012
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-02/31/2603
Subject(s) - tantalum , electron cyclotron resonance , etching (microfabrication) , electron , materials science , cathode ray , anode , beam (structure) , cyclotron resonance , cyclotron , oxide , atomic physics , chemistry , nanotechnology , physics , optics , nuclear physics , metallurgy , layer (electronics) , electrode
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