Open AccessStudies on Slurry Design Fundamentals for Advanced CMP Applications
Author(s) -
G. Bahar Basim,
Ayşe Karagöz,
Long Chen,
Ivan U. Vakarelski
Publication year - 2012
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-02/29/2488
Subject(s) - slurry , process engineering , computer science , engineering , environmental engineering
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