Open AccessThe Characteristics of Nano Scaled Polishing Induced Defect on the Silicon Surface
Author(s) -
Jang-Seop Kim,
Woo Sung Lee,
Don-Ha Hwang,
Hee-Bok Kang
Publication year - 2011
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2011-02/41/2431
Subject(s) - polishing , nano , silicon , materials science , surface (topology) , nanotechnology , engineering physics , metallurgy , engineering , composite material , geometry , mathematics
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