Open AccessImproved Performance of MIC Poly-Si TFTs Using Driven-In Nickel Induced Crystallization with Cap SiO2 by F Implantation
Author(s) -
Ming-Hui Lai,
YewChung Sermon Wu,
Teng-Fu Tung,
Hung-Yu Wu
Publication year - 2010
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2010-01/17/965
Subject(s) - crystallization , materials science , nickel , optoelectronics , chemical engineering , metallurgy , engineering
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