Open AccessExposure of Thick Polymethylglutarimide Films for Structural MEMS
Author(s) -
Ian G. Foulds,
Robert W. Johnstone,
See-Ho Tsang,
M. Parameswaran
Publication year - 2006
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2006-02/49/2142
Subject(s) - microelectromechanical systems , materials science , nanotechnology
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