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Strong preferred orientation of <100> was observed in surface orientation as shown in pole figure and inverse pole figures of Fig. 2. In the pole figure, it can also be seen that other 4 <100> directions are perpendicular to the 4 sides of the square shaped grains. This means that the in-plane orientation is also preferred with <100>. In our knowledge, this strong preference of the in-plane orientation has never been reported so far in poly-Si grains formed on amorphous substrate.

Preferred <100> Surface and In-Plane Orientations in Self-Assembled Poly-Si by Multiple Excimer Laser Irradiation