Open AccessFocused Electron Beam Induced Deposition of Silicon Oxide
Author(s) -
Heinz D. Wanzenboeck,
Markus Fischer,
Josef Gottsbachner,
Stefan Mueller,
W. Brezna,
M. Schramboeck,
E. Bertagnolli
Publication year - 2006
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2005-02/19/730
Subject(s) - silicon , deposition (geology) , materials science , cathode ray , electron beam induced deposition , silicon oxide , oxide , electron , optoelectronics , nanotechnology , engineering physics , physics , metallurgy , nuclear physics , geology , silicon nitride , sediment , paleontology
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