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Multiferroic BiFeO3 (BFO) thin film exhibiting desired ferroelectric andenhanced magnetic properties was grown on La0.67Sr0.33MnO3 (LSMO) bufferedPt/TiO2/SiO2/Si substrates by off-axis RF magnetic sputtering, where a highly(111)-oriented texture was obtained. The BFO/LSMO thin film exhibits excellentferroelectric and dielectric behaviors (2Pr ~210.7 {\mu}C/cm2, 2Ec~435 kV/cm,{\epsilon}r ~116.8, and tan{\delta} ~ 2.7% at 1 kHz), together with a longfatigue endurance up to 1010 switching cycles at amplitude of 300 kV/cm. Anenhancement in magnetic behavior was also observed with Ms=89.5 emu/cm3, whichis largely contributed from the magnetic layer of LSMO. The coexistence offerroelectric and ferromagnetic properties in the double layered BFO/LSMO thinfilm makes it a promising candidate system for applications where themagnetoelectric behavior is required.

Highly (111)-orientated BiFeO3 thin film deposited on La0.67Sr0.33MnO3 buffered Pt/TiO2/SiO2/Si (100) substrate